RF350 Ion source

Product introduction

The RF350 ion source operates by using RF power around the RF induction coil of the plasma tank. The RF field excited the electrons in the tank, causing them to collide with the gas atoms to produce ions, creating plasma in the plasma tank of the source.

Once the plasma is ignited, the potential on the grid extracts the ions from the source and accelerates their movement toward the substrate, creating an ion beam.