Grids

Product introduction

The ion source is a core component for the high-end equipment, assisting coating and etching by ion technology. The grid in ion source is an important consumable accessory that directly affects uniformity and densification, which determines the density, direction of motion, acceleration, etc. of the charged ions, and directly affects the product quality of the corresponding process.

Product features

The Ion source gird components produced our company are mainly used in Ion Beam Etching/Deposition equipment (IBE/IBD), the grid is a set of three molybdenum gird (Mo Grid), which are Beam Grid, Suppressor Grid and Ground Grid, with professional special surface processing and precision drilling processing. In order to ensure the uniformity of the ion beam, technical research is carried out in the aspects of accurate hole opening and angle distribution in grid by the combination of accurate measurement and high-precision numerical simulation. In addition, high-grade imported raw material is used to ensure the stability and durability of the product. It would be processed by ultra-high temperature and other unique stress molding technology. After multiple polishing and sandblasting, the product would be durable.