Vacuum chamber

Product introduction

Vacuum Chamber is the heart of the vacuum system, which is tailored to the specific application. The process like vacuum coating or surface analysis needs to be carried out in the vacuum chamber, so the quality of the vacuum chamber is also one of the key factors in the performance of vacuum equipment. The vacuum chambers manufactured by our company are mainly used in IBE, IBD, ALD and other related fields, and can be designed and manufactured according to the different needs of customers.

For vacuum chamber, the materials commonly used are stainless steel, aluminum alloy, carbon steel, etc., the shapes are rectangular, cylindrical and polygonal, and the surface treatment contains sandblasting, polishing, electrolytic polishing, etc. In addition, heat treatment stress elimination or vibration stress elimination would be taken according to the needs of customers, to provide customers with a more complete vacuum process solution.